微电晕-开尔文技术在高k MOS电容器非接触监测中的应用

发布到: Meeting Abstracts - The Electrochemical Society

年: 2008

作者: Anton Belyaev, Marshall Wilson, Jacek Lagowski, Lubek Jastrzebski, Andrew Findlay, J Price, CS Park, Muhammad M Hussain, G Bersuker, PS Lysaght

Corona-Kelvin MetrologyDielectricsNon-Contact Measurement

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