通过表面光电压映射进行 VISZ 非视觉缺陷监测

发布到: ECS Transactions

年: 2016

作者: Andrew David Findlay, Dmitriy Marinskiy, Piotr Edelman, Marshall Wilson, Alexandre Savtchouk, Carlos Almeida, Jacek Lagowski

Non-Contact Measurementsilicon carbide (SiC)surface voltagewafer mappingnon-visual defects

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