Lehighton-2000M Sheet Resistance and Mobility Measurement
This non-contact, non-destructive system is designed to characterize charge carrier mobility and sheet resistance of compound semiconductor wafers up to 200 mm in diameter. It combines RF reflectance with a permanent magnet for mobility measurement and Eddy Probe technology for sheet resistance analysis. With high throughput and full-wafermapping, it delivers uniformity analysis essential for semiconductor manufacturing and R&D.
関連出版物
physica status solidi (a) - applications and materials science2022
Characterization of AlXGa1−XN/GaN High Electron Mobility Transistor Structures with Mercury Probe Capacitance–Voltage and Current–Voltage
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Solar Energy Materials and Solar Cells, Volume 218, 1107662020
Contactless Measurement of Sheet Resistance and Mobility of Inversion Charge Carriers on PV Wafers
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Materials Today: Proceedings2023
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Solar Energy Materials and Solar Cells Volume 260, 15 September 2023, 1124612023
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