MCV-530 (L) Mercury Probe System
The MCV-530 series utilizes proprietary Mercury Capacitance-Voltage technology for non-destructive, high-precision characterization of dielectrics and epitaxial semiconductor layers. Trusted globally by leading semiconductor manufacturers and R&D centers, it provides reliable resistivity profiling, dielectric characterization, and interface analysis.
関連出版物
ECS Journal of Solid State Science and Technology (2021) Volume 10, Number 72021
Assessment of Surface Preparation Methods for Mercury (Hg) Probe Schottky Capacitance-Voltage (MCV) on Epitaxial Silicon
著者: Cristina Sanna, Patrick Taylor, Robert Hillard, Samuel Frey, Dan McDonald, Jonny Hoglund, Gyula Zsakai, Attila Marton and Peter Horvath
Epitaxial siliconmercury probesurface treatmentMERCURY C-V PROFILING
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physica status solidi (a) - applications and materials science2022
Characterization of AlXGa1-XAs/GaN High Electron Mobility Transistor (HEMT) Structures with Mercury Probe Capacitance-Voltage and Current-Voltage
著者: Eric Tucker,Frank Ramos,Samuel Frey,Robert J. Hillard,Péter Horváth,Gyula Zsákai,Attila Márton
Hg CV
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physica status solidi (a) - applications and materials science2022
Characterization of AlXGa1−XN/GaN High Electron Mobility Transistor Structures with Mercury Probe Capacitance–Voltage and Current–Voltage
著者: Eric Tucker, Frank Ramos, Samuel Frey, Robert J. Hillard, Péter Horváth, Gyula Zsákai, Attila Márton
dielectric characterizationdielectric chargeMERCURY C-V PROFILING2DEG sheet charge
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