SE-2000 Spectroscopic Ellipsometry
The modular Spectroscopic Ellipsometer is a highly versatile thin film characterization system covering the widest spectral range in a single tool (190 nm – 25 µm). It enables non-contact, non-destructive analysis of film thickness, optical constants, multilayer stacks, and advanced material properties with unmatched flexibility.
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A Novel Pretreatment for Thin-Film Measurements
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AIP Conference Proceedings 21472019
Accurate contact and contactless methods for emitter sheet resistance testing of PV wafers
著者: Ferenc Korsós, Péter Tüttő, Ilias Saegh, Krisztián Kis-Szabó, and Attila Tóth
4ppdiffusionjunction photovoltage techniquephotovoltaics
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Vacuum Volume 192, October 2021, 1104152021
Ammonia-vapour-induced two-layer transformation of mesoporous silica coatings on various substrates
著者: Lenke Kócs, Borbála Tegze, Emőke Albert, Csaba Major, András Szalai, Bálint Fodor, Péter Basa, György Sáfrán, Zoltán Hórvölgyi
porous silica coatingsspectroscopic ellipsometryELLIPSOMETRIC POROSIMETRYmesoporous
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Science Advances, Sci. Adv. 11, 2025
Amphiphilic nanopores that condense undersaturatedwater vapor and exude water droplets
著者: Baekmin Q. Kim1†, Zachariah Vicars1†, Máté Füredi2,3, Lilia F. Escobedo1, R. Bharath Venkatesh1‡, Stefan Guldin2,4,5, Amish J. Patel1*, Daeyeon Lee1
spectroscopic ellipsometry
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Thin Solid Films2022
Analysis of malaria infection byproducts with Mueller matrix transmission ellipsometry
著者: P. Basa, B. Fodor, Zs. Nagy, B. Oyunbolor, A. Hajtman, S. Bordács, I. Kézsmárki, A. Halbritter, Á. Orbán
ellipsometryrotating compensatormueller matrixspectroscopic ellipsometer
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Advanced Semiconductor Manufacturing Conference ASMC), 2014 Annual SEMI2014
Benefit of Combining Metrology Techniques for Thin SiGe:B Layers
著者: D. Le Cunff, T. Nguyen, R. Duru, F. Abbate, J. Hoglund, N. Laurent, F. Pernot, M. Wormington
Ge-Si alloysboronelemental semiconductorssemiconductor doping
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The Journal of Physical Chemistry Letters2024
Beyond the Meso-/Macroporous boundary: Extending Capillary Condensation-based Pore Size Characterization in Thin Films Through Tailored Adsorptives
著者: Máté Füredi, Cristina V. Manzano, András Marton, Bálint Fodor, Alberto Alvarez-Fernandez,*
EP
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Nanoscale Horizons, 2025, Advance Article, UK (The Royal Society of Chemistry 2025) Nanoscale Horizons, 2025,10, 760-7692025
Block copolymer-assembled nanopore arrays enable ultrasensitive label-free DNA detection
著者: Maximiliano Jesus Jara Fornerod, Alberto Alvarez-Fernandez, Máté Füredi, Anandapadmanabhan A Rajendran, Beatriz Prieto-Simón, Nicolas H. Voelcker, Stefan Guldin
spectroscopic ellipsometry
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Review of Scientific Instruments 92, 119501 (2021)2021
Breakthrough instruments and products: Investigation of atomic layer deposited Al:ZnO layer by spectroscopic ellipsometry from the deep-UV to the mid-IR in one instrument
著者: László Makai, Tero Lehto, Bálint Fodor, Peter King
dopingElectrical propertiesspectroscopic ellipsometrythin films
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Applied Surface Science 269 (2013) 23– 282013
Charging Behavior of Silicon Nitride Based Non-Volatile Memory Structures with Embedded Semiconductor Nanocrystals
著者: Zs.J. Horváth, P. Basa, T. Jászi, K.Z. Molnár, A.E. Pap, Gy. Molnár
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UCPSS, Sep. 2002, Oostende, Belgium2002
Cleaning of Si Surfaces by Lamp Illumination
著者: A. Danel, C.L. Tsai, K. Shanmugasundaram, F. Tardif, E. Kamieniecki, J. Ruzyllo
Lamp cleaningOrganic contaminationVolatile contaminantshydrocarbons
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Journal of Micro/Nanopatterning, Materials, and Metrology, Vol. 23, Issue 1, 014001 (February 2024).2024
Detection of structural asymmetries in Forksheet FET arrays using Mueller matrix ellipsometry, a theoretical study
著者: Balogh Imre, Kiss Roberta Zsófia, Egri Dávid
spectroscopic ellipsometry
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Thin Solid Films 590 2015) 1342015
Ellipsometry Study of Process Deposition of Amorphous Indium Gallium Zinc Oxide Sputtered Thin Films
著者: C. Talagrand, X. Boddaert, D.G. Selmeczi, C. Defranoux, P. Collot
InGaZnOspectroscopic ellipsometryDielectric functionProcess deposition
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Applied Surface Science 379 2016) 3042016
Homogeneous Transparent Conductive ZnO:Ga by ALD for Large LED Wafers
著者: Homogeneous Transparent Conductive ZnO:Ga by ALD for Large LED Wafers
GZO; Atomic layer deposition; TCO; Rapid thermal annealing; LED
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Journal of Applied Physics2016
Inkjet-Printed Vertically Emitting Solid-State Organic Lasers
著者: O. Mhibik, S. Ch´enais, S. Forget, Ch. Defranoux, S. Sanaur
vertically-emitting solid-state organic lasers (VECSOLs); inkjet printing; new host polymer matrix for standard laser dyes; Tunable laser
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Thin Solid Films2023
Internal wettability investigation of mesoporous silica materials by ellipsometric porosimetry
著者: Máté Füredi, Bálint Fodor, András Marton, Alberto Alvarez-Fernandez, Aysha ARiaz, Curran Kalha, Anna Regoutz, Stefan Guldin, Péter Basa
Ellipsometersellipsometryellipsometry porosimetryELLIPSOMETRIC POROSIMETRY
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Journal of Vacuum Science & Technology B2019
Monitoring subwavelength grating structures for vertical-cavity surface-emitting laser applications by spectroscopic ellipsometry
著者: Emeric Balogh, Peter Basa, Attila Suto, Benjamin Powell, Anna Bölcskei-Molnár, and Szilvia Biró
ellipsometryspectroscopic ellipsometry
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Applied Physics Letters 115, 1619022019
Near-infrared optical properties and proposed phase-change usefulness of transition metal disulfides
著者: Akshay Singh, Yifei Li, Balint Fodor, Laszlo Makai, Jian Zhou, Haowei Xu, Austin Akey, Ju Li and R. Jaramillo
ellipsometryvisible spectraTransmission electron microscopyDensity functional theory
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Thin Solid Films 567 2014) 142014
On Determining the Optical Properties and Layer Structure from Spectroscopic Ellipsometric Data using Automated Artifact Minimization Method
著者: J. Budai, B. Farkas, Z.L. Horváth, Zs. Geretovszky
ellipsometrymodellingArtifact minimizationNumerical inversion
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Advanced Sensor Research Volume2, Issue7 July 2023, 22000772023
On the Rational Design of Mesoporous Silica Humidity Sensors
著者: Máté Füredi, Alberto Alvarez-Fernandez, Maximiliano Jesus Jara Fornerod, Bálint Fodor, and Stefan Guldin
spectroscopic ellipsometryEP
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Optics Letters, Vol. 38, Issue 19, pp. 3969-39722013
Spectroscopic Ellipsometry on Metal and Metal-Oxide Multilayer Hybrid Plasmonic Nanostructures
著者: A.A. Khosroabadi, P. Gangopadhyay, B. Cocilovo, L. Makai, P. Basa, B. Duong, J. Thomas, and R.A. Norwood
spectroscopic ellipsometry
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Thin Solid Films2022
Spectroscopic ellipsometry investigation of free liquid-liquid and liquid-air interfaces
著者: László Makai, Benjamin Kalas, György Tiborcz
EllipsometersellipsometryInterfacesspectroscopic ellipsometry
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ACS Electrochemistry 2025, 1, 6, 962–9732025
Structural Evolution of Silicon Nitride Anodes during Electrochemical Lithiation
著者: Adam J. Lovett*, Máté Füredi, Liam Bird, Samia Said, Brandon Frost, Paul R. Shearing, Stefan Guldin, Thomas S. Miller*
spectroscopic ellipsometry
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Thin Solid Films 571 2014) 7202014
Study of Annealing Effects Upon the Optical and Electrical Properties of SnO2:F/SiCxOy Low Emissivity Coatings by Spectroscopic Ellipsometry
著者: K. Wang, B. Cheng, B. Wu, C. Defranoux, P. Basa, C. Song, G. Han, Y. Liu
spectroscopic ellipsometryFluorinated tin oxideLow emissivityannealing
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Anyagvizsgálók Lapja 2020/I2020
Szilicium felületkezelése femtoszekundomos lézerrel (Surface treatment using femtosecond laser technology)
著者: Windisch M., Buza G., Maloveczky A., Vida Á., Selmeczi D., Dankházi Z.:
Si surfacesspectroscopic ellipsometrysurface treatment
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Journal of Materials Chemistry C, Royal Society of Chemistry2024
The influence of stabiliser concentration on the formation of In2O3 thin films
著者: Aysha A. Riaz, Curran Kalha Maria Basso, Máté Füredi, Anna Regoutz
spectroscopic ellipsometry
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関連ホワイトペーパー
August 18, 2025
Forksheet FET - the Future of Transistor Manufacturing?
Semilab, within the IT2 EU project, explores Mueller matrix ellipsometry as a powerful method to detect asymmetries in forksheet FETs—offering enhanced precision over conventional techniques and supporting Europe's push for semiconductor innovation.
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August 18, 2025
How Does Advanced Metrology Benefit the PV Industry?
Explore how advanced metrology plays a crucial role in the photovoltaic industry by enhancing efficiency, ensuring quality control, supporting research and development, and reducing costs.
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August 18, 2025
How Spectral Ellipsometry Measurements are Conducted on Bulk Liquids
Enabling precise optical characterization of bulk liquids using advanced spectral ellipsometry despite interface instability.
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August 18, 2025
How to Determine the Internal Wettability of Nanostructured Thin Films
Advancing wettability analysis of nanostructured thin films with ellipsometric porosimetry and spectral ellipsometry.
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August 18, 2025
Precision Measurement Tools for the Sub-Nanoscale
Real-time in situ spectroscopic ellipsometry reveals key insights into sub-nanoscale growth of molybdenum carbide thin films.
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October 17, 2025
R&D Keeps The World Moving Forward - So Are Semilab’s Spectroscopic Ellipsometry Solutions
Technological development is transforming every aspect of our lives and our world at an unprecedented rate, and Semilab proudly contributes to this incredible pace.
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August 18, 2025
R&D Lab Tools for the Display Industry
Innovation in the electronic display industry is driven by advanced R&D tools enabling precise measurement and development.
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