SRP-170 Spreading Resistance Profiling
The SRP-170 is a cost-effective, spreading resistance profiler designed for silicon semiconductor dopant and resistivity profiling. Ideal for universities, research institutes, and low-volume analytical labs, it offers reliable performance with manual loading and expert-guided operation. Additional sample preparation kit for in-house sample preparation included.
関連出版物
microPL, JPV, photo-modulated reflectance2023
Effects of Ion Channeling and Co-implants on Ion Ranges and Damage in Si: Studies with PL, SRP, SIMS and MC models
著者: Samu Viktor, Kerekes Árpád, Pongrácz Anita, Durkó Zsolt
microPLJPVphoto-modulated reflectance
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Applied Research Journal2024
Epitaxial silicon transition zone measurements by spreading resistance profiling and Fourier transform infrared reflectometry
著者: E. E. Najbauer, L. Sinkó, Sz. Biró, Z. Durkó, P. Basa
carrier densityepitaxial layersemiconductorSilicon (Si)
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