SRP-2100 / SRP-2100i Spreading Resistance Profiling
The SRP-2100 series is Semilab’s flagship solution for high-precision spreading resistance profiling (SRP) and dopant concentration analysis in semiconductor wafers. Suitable for silicon and compound semiconductors (with PCIV option), it delivers fully automated, accurate depth profiling for process monitoring, failure analysis, and device characterization.
関連出版物
microPL, JPV, photo-modulated reflectance2023
Effects of Ion Channeling and Co-implants on Ion Ranges and Damage in Si: Studies with PL, SRP, SIMS and MC models
著者: Samu Viktor, Kerekes Árpád, Pongrácz Anita, Durkó Zsolt
microPLJPVphoto-modulated reflectance
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Applied Research Journal2024
Epitaxial silicon transition zone measurements by spreading resistance profiling and Fourier transform infrared reflectometry
著者: E. E. Najbauer, L. Sinkó, Sz. Biró, Z. Durkó, P. Basa
carrier densityepitaxial layersemiconductorSilicon (Si)
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