Materials Science and Engineering, B41989
반도체 내 심층 준위의 분산형 마이크로파 과도 분광법
저자: D. Huber, P. Eichinger, G. Ferenczi, T. Pavelka, G. Veszely
주제: Microwave transient spectroscopy; deep levels; semiconductor
간행물 읽기

The COREMA-2000 series offers precise, non-destructive, contactless resistivity measurement solutions designed primarily for semi-insulating compound semiconductors such as SiC, GaN, GaAs, CdTe, GaO, and InP. It supports both research and industrial semiconductor manufacturing environments with high accuracy and repeatability.
COREMA-2000 비접촉식 저항률 매핑