Identification Possibility of Metallic Impurities in p-Type Silicon by Lifetime Measurement

发布到: J. Electrochem. Soc., 143, No. 1, 216-220

年: 1996

作者: T.S. Horányi, P. Tüttő, Cs. Kovacsics

oxidationSilicon (Si)temperaturenitrogen compoundsoxygen compoundsquartzsurface treatment

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