Semilab

DLS-1100 Deep Level Transient Spectroscopy

The DLS-1100 is a high-end DLTS system designed for semiconductor R&D and production environments. Featuring an external cryostat for precise temperature control, it offers top-tier sensitivity, full automation, and advanced customization — ideal for production labs, foundries, and high-throughput research facilities.

関連出版物

J. Electrochem. Soc., 147 10), pp. 3879-38882000

Analytical Tools for the Characterization of Power Devices

著者: H-J. Schulze, A. Frohnmeyer, F-J. Niedernostheide, B. Simmnacher, B.O. Kolbesen, P. Tüttő, T. Pavelka, G. Wachutka
transition metalscontaminationcarrier lifetimesilicon defect density
出版物を読む
Applied Surface Science,70/71, 391-3951993

Ballistic Electron Emission Microscopy of Schottky Diodes on RF-Plasma-Treated Silicon

著者: L. Quattropani, K. Solt, P. Niedermann, I. Maggio-Aprile, O. Fischer, T. Pavelka
Schottky diodeRF plasma treated silicon
出版物を読む
Semicond. Sci. Technol., 5, 1100-11041990

DLTS Investigation of Deep Levels in Bulk GaAs under Uniaxial Stress

著者: C.A. Londos, T. Pavelka
DLTSGaAs
出版物を読む
Journal of the Electrochemical Society 146 1999) 37731999

Diffusion of Iron in Silicon Dioxide

著者: D.A. Ramappa, W.B. Henley
diffusionironsilicon dioxide
出版物を読む
Applied Surface Science 379 2016) 3042016

Homogeneous Transparent Conductive ZnO:Ga by ALD for Large LED Wafers

著者: Homogeneous Transparent Conductive ZnO:Ga by ALD for Large LED Wafers
GZO; Atomic layer deposition; TCO; Rapid thermal annealing; LED
出版物を読む
Materials Science Forum Vols.38-41, 803-808

Interpretation of the Electric Field Dependent Thermal Emission Data of Deep Traps

著者: T. Pavelka and G. Ferenczi
Thermal emissiondeep trap
出版物を読む
Journ. of Crystal Growth, 210, 116-1212000

Investigation of Deep Levels and Precipitates Related to Molybdenum in Silicon by DLTS and Scanning Infrared Microscopy

著者: B. Sandhu, T. Ogikubo, H. Goto, V. Csapó, T. Pavelka
DLTSSIRMSilicon (Si)Mo
出版物を読む
International Conference on Frontiers of Characterization and Metrology, 20072007

NIST Traceable Small Signal Surface Photo Voltage Reference Wafer

著者: A. Bertuch, K. Steeples
NIST traceablesurface photovoltagestandardreference wafer
出版物を読む
Materials Science in Semiconductor Processing2024

Quantitative shear stress imaging in high throughput in-line Si wafer inspection

著者: Zsolt Kovács, Csanád Ö. Boros, Teodóra N. Kovács, Zsolt Kovács, ZoltánT. Kiss
optical inspectionSilicon (Si)POLARIZED INFRARED IMAGINGVISUAL INSPECTION
出版物を読む
Materials Science Forum Vols. 38-41, 469-4721989

Temperature Dependence of the Capture Cross Section of Seo as Measured by Microwave Absorption Spectroscopy (MAS)

著者: T. Pavelka and B. Hemm
Microwave Absorption Spectroscopy
出版物を読む
Appl.Phys.Letters 91, 0331102007

Three Dimensional Mapping of Thermal and Tunneling Electron Emission from InAs/GaAs Quantum Dots

著者: O. Engström, M.Kaniewska, W.Jung, M.Kaczmarczyk
Deep level transient spectroscopyquantum dotstunnelingconduction bands
出版物を読む

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