Semilab

DLS-83D Deep Level Transient Spectroscopy

The DLS-83D is a compact, tabletop Deep Level Transient Spectroscopy (DLTS) system designed for high-sensitivity characterization and identification of electrically active defects (deep-level traps) and impurities in semiconductor wafers. It is ideal for universities, material science research centers, and advanced R&D labs, offering precise and reliable measurements in a small footprint.

関連出版物

Nature scientific reports2024

Radical electron-induced cellulose-semiconductors

著者: Mikio Fukuhara, Tomonori Yokotsuka, Tetsuo Samoto, Masahiko Kumadaki, Mitsuhiro Takeda, Toshiyuki Hashida
Hall effect measurementsMaterials scienceOrganic contaminationsemiconductor
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J. Electrochem. Soc., 147 10), pp. 3879-38882000

Analytical Tools for the Characterization of Power Devices

著者: H-J. Schulze, A. Frohnmeyer, F-J. Niedernostheide, B. Simmnacher, B.O. Kolbesen, P. Tüttő, T. Pavelka, G. Wachutka
transition metalscontaminationcarrier lifetimesilicon defect density
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Applied Surface Science,70/71, 391-3951993

Ballistic Electron Emission Microscopy of Schottky Diodes on RF-Plasma-Treated Silicon

著者: L. Quattropani, K. Solt, P. Niedermann, I. Maggio-Aprile, O. Fischer, T. Pavelka
Schottky diodeRF plasma treated silicon
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Characterization and Metrology for ULSI Technology, 20002000

COCOS (Corona Oxide Characterization of Semiconductor) Non-Contact Metrology for Gate Dielectrics

著者: M. Wilson, J. Lagowski, L. Jastrzebski, A. Savtchouk, V. Faifer
COCOSDielectricsSemiconductor device characterizationDielectric thin films
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Materials Science & Engineering B91-92 2002), 192-2102002

Contactless Surface Charge Semiconductor Characterization

著者: D.K. Schröder
Silicon (Si)Electric measurementsMetal–insulator–semiconductor structuresSurface and interface states
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Semicond. Sci. Technol., 5, 1100-11041990

DLTS Investigation of Deep Levels in Bulk GaAs under Uniaxial Stress

著者: C.A. Londos, T. Pavelka
DLTSGaAs
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Journal of the Electrochemical Society 146 1999) 37731999

Diffusion of Iron in Silicon Dioxide

著者: D.A. Ramappa, W.B. Henley
diffusionironsilicon dioxide
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Materials Science and Engineering, B41989

Dispersive Microwave Transient Spectroscopy of Deep Levels in Semiconductors

著者: D. Huber, P. Eichinger, G. Ferenczi, T. Pavelka, G. Veszely
Microwave transient spectroscopydeep levelssemiconductor
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Materials Science Forum Vols.38-41, 803-808

Interpretation of the Electric Field Dependent Thermal Emission Data of Deep Traps

著者: T. Pavelka and G. Ferenczi
Thermal emissiondeep trap
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Journ. of Crystal Growth, 210, 116-1212000

Investigation of Deep Levels and Precipitates Related to Molybdenum in Silicon by DLTS and Scanning Infrared Microscopy

著者: B. Sandhu, T. Ogikubo, H. Goto, V. Csapó, T. Pavelka
DLTSSIRMSilicon (Si)Mo
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Materials Science Forum Vols. 38-41, 469-4721989

Temperature Dependence of the Capture Cross Section of Seo as Measured by Microwave Absorption Spectroscopy (MAS)

著者: T. Pavelka and B. Hemm
Microwave Absorption Spectroscopy
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Appl.Phys.Letters 91, 0331102007

Three Dimensional Mapping of Thermal and Tunneling Electron Emission from InAs/GaAs Quantum Dots

著者: O. Engström, M.Kaniewska, W.Jung, M.Kaczmarczyk
Deep level transient spectroscopyquantum dotstunnelingconduction bands
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関連ホワイトペーパー

Deep-level Transient Spectroscopy for Wafer Inspection

August 18, 2025

Deep-level Transient Spectroscopy for Wafer Inspection

DLTS offers unmatched sensitivity for detecting and analyzing defects in semiconductors, making it a powerful tool for advanced wafer characterization.

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Interpreting QD Properties with Deep-Level Transient Spectroscopy

August 18, 2025

Interpreting QD Properties with Deep-Level Transient Spectroscopy

Uncover the intricacies of your semiconductor samples with precision and confidence and join us in shaping the future of quantum dot technologies and semiconductor excellence.

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The Latest Semiconductor Industry Trends And Semilab’s Contribution To The Market

October 17, 2025

The Latest Semiconductor Industry Trends And Semilab’s Contribution To The Market

Meeting rising chip demand with precision: How Semilab’s Advanced Metrology takes on complexity in semiconductor manufacturing.

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What You Need To Know About Using Deep Level Transient Spectroscopy In Semiconductor Manufacturing

August 18, 2025

What You Need To Know About Using Deep Level Transient Spectroscopy In Semiconductor Manufacturing

Semilab provides DLTS solutions with over 30 years of global experience.

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