Materials Science and Engineering, B41989
半導體深能階的色散微波瞬態光譜
作者: D. Huber, P. Eichinger, G. Ferenczi, T. Pavelka, G. Veszely
主題: Microwave transient spectroscopy; deep levels; semiconductor
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The COREMA-2000 series offers precise, non-destructive, contactless resistivity measurement solutions designed primarily for semi-insulating compound semiconductors such as SiC, GaN, GaAs, CdTe, GaO, and InP. It supports both research and industrial semiconductor manufacturing environments with high accuracy and repeatability.
COREMA-2000 非接觸式電阻率分布量測儀
