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The MCV-530 series utilizes proprietary Mercury Capacitance-Voltage technology for non-destructive, high-precision characterization of dielectrics and epitaxial semiconductor layers. Trusted globally by leading semiconductor manufacturers and R&D centers, it provides reliable resistivity profiling, dielectric characterization, and interface analysis.
Author
Cristina Sanna, Patrick Taylor, Robert Hillard, Samuel Frey, Dan McDonald, Jonny Hoglund, Gyula Zsakai, Attila Marton and Peter Horvath
Topic
Epitaxial silicon; mercury probe; surface treatment; MERCURY C-V PROFILING; Capacitance-voltage characteristics; p-type; pre-treatment chamber
Author
Eric Tucker,Frank Ramos,Samuel Frey,Robert J. Hillard,PƩter HorvƔth,Gyula ZsƔkai,Attila MƔrton
Topic
Hg CV
Author
Eric Tucker, Frank Ramos, Samuel Frey, Robert J. Hillard, PƩter HorvƔth, Gyula ZsƔkai, Attila MƔrton
Topic
dielectric characterization; dielectric charge; MERCURY C-V PROFILING; 2DEG sheet charge; pinch-off voltage; mercury gate
