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The SRP-2100 series is Semilab鈥檚 flagship solution for high-precision spreading resistance profiling (SRP) and dopant concentration analysis in semiconductor wafers. Suitable for silicon and compound semiconductors (with PCIV option), it delivers fully automated, accurate depth profiling for process monitoring, failure analysis, and device characterization.
Author
Samu Viktor, Kerekes 脕rp谩d, Pongr谩cz Anita, Durk贸 Zsolt
Topic
microPL; JPV; photo-modulated reflectance
Author
E. E. Najbauer, L. Sink贸, Sz. Bir贸, Z. Durk贸, P. Basa
Topic
carrier density; epitaxial layer; semiconductor; Silicon (Si); SRP-2100; SRP; FTIR REFLECTOMETRY
