SRP-2100 / SRP-2100i Spreading Resistance Profiling
The SRP-2100 series is Semilab’s flagship solution for high-precision spreading resistance profiling (SRP) and dopant concentration analysis in semiconductor wafers. Suitable for silicon and compound semiconductors (with PCIV option), it delivers fully automated, accurate depth profiling for process monitoring, failure analysis, and device characterization.
Related Publications
microPL, JPV, photo-modulated reflectance2023
Effects of Ion Channeling and Co-implants on Ion Ranges and Damage in Si: Studies with PL, SRP, SIMS and MC models
Author: Samu Viktor, Kerekes Árpád, Pongrácz Anita, Durkó Zsolt
microPLJPVphoto-modulated reflectance
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Applied Research Journal2024
Epitaxial silicon transition zone measurements by spreading resistance profiling and Fourier transform infrared reflectometry
Author: E. E. Najbauer, L. Sinkó, Sz. Biró, Z. Durkó, P. Basa
carrier densityepitaxial layersemiconductorSilicon (Si)
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