Application of Micro Corona-Kelvin Technique to Non-contact Monitoring of High-k MOS Capacitors
Published to: Meeting Abstracts - The Electrochemical Society
Year: 2008
Author: Anton Belyaev, Marshall Wilson, Jacek Lagowski, Lubek Jastrzebski, Andrew Findlay, J Price, CS Park, Muhammad M Hussain, G Bersuker, PS Lysaght
