Determination of electrically Active Surface Dopant Density in Ultra-Shallow Junction (USJ) Structures with a Non-Destructive Elastic Material Probe (EM-Probe)
Published to: Ultra Shallow Junctions 2005, Daytona Beach, Florida
Year: 2005
Author: R.J. Hillard, M.V. Benjamin, W.C. Ye, J.O. Borland
