Fabrication and Characterisation Challenges on Ultra Shallow Junctions for sub 45 nm CMOS Devices
Published to: Technical & Scientific Meeting of ARCSIS, 20-21 Nov., STUniversity in Fuveau, France 2008)
Year: 2008
Author: F. Torregrosa, H. Etienne, G. Sempere, G. Mathieu, L. Roux, C. Grosjean, R. Daineche, Y. De Puydt, L. Dupuy, P. Galand, A. Pap, K. Kis-Szabo, T. Pavelka
