COREMA-2000 非接触抵抗率マッピング

• Original developer of the SEMI standard and leading global support network
• Fully compliant with SEMI M87-0422 industry standard for non-contact resistivity measurement
• Trusted and deployed globally in 14+ countries
• No calibration needed for routine operation
• User-friendly graphical interface with colored topographic display
• Non-contact, non-destructive full-wafer resistivity measurement
• Excellent measurement repeatability and wide measurement range
• Measurement Principle: Contactless capacitance technique for full-water resistivity characterization across a very wide range in the semi-insulating region
• Operator & Automation:
  
  • Full automation supported on request (especially Corema-2201 model with robotic wafer handling)
  • Measurement parameters and process sequences fully customizable
  • Semi-automatic wafer placement
• Data & Software:
  
  • Built-in software provides detailed wafer maps and resistivity profiles
  • Customizable reporting tailored to industry standards with data available in various formats; Semilab internal format, TXT, and PDF

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