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The DLS-1200 is a state-of-the art sensitivity Semilab Deep Level Transient Spectroscopic device, designed for the wafer & EPI manufacturers, IC fabs and research institutes due to recent hardware and software improvements.
Equipped with different cryostats, DLS-1200 detects and identifies electrically active impurities over wide temperature ranges on semiconductor samples. The new DLS-1200 provides the same top-tier sensitivity, low-noise and full automation, and now comes with the previously optional TAS included as a standard.
Semilab DLS-1200 is the successor of the DLS-1100 system, therefore DLS-1100 will be discontinued with the release of DLS-1200.
DLS-1200 Deep Level Transient Spectroscopy
Author: H-J. Schulze, A. Frohnmeyer, F-J. Niedernostheide, B. Simmnacher, B.O. Kolbesen, P. Tüttő, T. Pavelka, G. Wachutka
Topic: transition metals; contamination; carrier lifetime; silicon defect density
Author: L. Quattropani, K. Solt, P. Niedermann, I. Maggio-Aprile, O. Fischer, T. Pavelka
Topic: Schottky diode; RF plasma treated silicon
Author: C.A. Londos, T. Pavelka
Topic: DLTS; GaAs
Author: D.A. Ramappa, W.B. Henley
Topic: diffusion; iron; silicon dioxide
Author: Homogeneous Transparent Conductive ZnO:Ga by ALD for Large LED Wafers
Topic: GZO; Atomic layer deposition; TCO; Rapid thermal annealing; LED
Author: T. Pavelka and G. Ferenczi
Topic: Thermal emission; deep trap
Author: B. Sandhu, T. Ogikubo, H. Goto, V. Csapó, T. Pavelka
Topic: DLTS; SIRM; Silicon (Si); Mo; Fe; deep levels; carrier lifetime
Author: A. Bertuch, K. Steeples
Topic: NIST traceable; surface photovoltage; standard; reference wafer; Electric measurements; Electrical resistivity; Metrology; Epitaxy; Silicon (Si)
Author: Zsolt Kovács, Csanád Ö. Boros, Teodóra N. Kovács, Zsolt Kovács, ZoltánT. Kiss
Topic: optical inspection; Silicon (Si); POLARIZED INFRARED IMAGING; VISUAL INSPECTION
Author: T. Pavelka and B. Hemm
Topic: Microwave Absorption Spectroscopy
Author: O. Engström, M.Kaniewska, W.Jung, M.Kaczmarczyk
Topic: Deep level transient spectroscopy; quantum dots; tunneling; conduction bands; electric field
DLS-1200 Deep Level Transient Spectroscopy
