Contact us for Information and Pricing
Get expert advice and tailored solutions for your research needs
Get expert advice and tailored solutions for your research needs
The DLS-83D is a compact, tabletop Deep Level Transient Spectroscopy (DLTS) system designed for high-sensitivity characterization and identification of electrically active defects (deep-level traps) and impurities in semiconductor wafers. It is ideal for universities, material science research centers, and advanced R&D labs, offering precise and reliable measurements in a small footprint.
Author
Mikio Fukuhara, Tomonori Yokotsuka, Tetsuo Samoto, Masahiko Kumadaki, Mitsuhiro Takeda, Toshiyuki Hashida
Topic
Hall effect measurements; Materials science; Organic contamination; semiconductor; semiconductor materials; Semiconductor Devices; NANO HARDNESS; PDL Hall
Author
H-J. Schulze, A. Frohnmeyer, F-J. Niedernostheide, B. Simmnacher, B.O. Kolbesen, P. Tüttő, T. Pavelka, G. Wachutka
Topic
transition metals; contamination; carrier lifetime; silicon defect density
Author
L. Quattropani, K. Solt, P. Niedermann, I. Maggio-Aprile, O. Fischer, T. Pavelka
Topic
Schottky diode; RF plasma treated silicon
Author
M. Wilson, J. Lagowski, L. Jastrzebski, A. Savtchouk, V. Faifer
Topic
COCOS; Dielectrics; Semiconductor device characterization; Dielectric thin films; Electric measurements; Contact potential
Author
D.K. Schröder
Topic
Silicon (Si); Electric measurements; Metal–insulator–semiconductor structures; Surface and interface states; Contact potential; Work function; Epitaxial silicon
Author
C.A. Londos, T. Pavelka
Topic
DLTS; GaAs
Author
D.A. Ramappa, W.B. Henley
Topic
diffusion; iron; silicon dioxide
Author
D. Huber, P. Eichinger, G. Ferenczi, T. Pavelka, G. Veszely
Topic
Microwave transient spectroscopy; deep levels; semiconductor
Author
T. Pavelka and G. Ferenczi
Topic
Thermal emission; deep trap
Author
B. Sandhu, T. Ogikubo, H. Goto, V. CsapĂł, T. Pavelka
Topic
DLTS; SIRM; Silicon (Si); Mo; Fe; deep levels; carrier lifetime
Author
T. Pavelka and B. Hemm
Topic
Microwave Absorption Spectroscopy
Author
O. Engström, M.Kaniewska, W.Jung, M.Kaczmarczyk
Topic
Deep level transient spectroscopy; quantum dots; tunneling; conduction bands; electric field
August 18, 2025
DLTS offers unmatched sensitivity for detecting and analyzing defects in semiconductors, making it a powerful tool for advanced wafer characterization.
August 18, 2025
Uncover the intricacies of your semiconductor samples with precision and confidence and join us in shaping the future of quantum dot technologies and semiconductor excellence.
October 17, 2025
Meeting rising chip demand with precision: How Semilab’s Advanced Metrology takes on complexity in semiconductor manufacturing.
August 18, 2025
Semilab provides DLTS solutions with over 30 years of global experience.