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The modular Spectroscopic Ellipsometer is a highly versatile thin film characterization system covering the widest spectral range in a single tool (190 nm – 25 µm). It enables non-contact, non-destructive analysis of film thickness, optical constants, multilayer stacks, and advanced material properties with unmatched flexibility.
Author
Ferenc Korsós, Péter Tüttő, Ilias Saegh, Krisztián Kis-Szabó, and Attila Tóth
Topic
4pp; diffusion; junction photovoltage technique; photovoltaics; process monitoring
Author
Lenke Kócs, Borbála Tegze, Emőke Albert, Csaba Major, András Szalai, Bálint Fodor, Péter Basa, György Sáfrán, Zoltán Hórvölgyi
Topic
porous silica coatings; spectroscopic ellipsometry; ELLIPSOMETRIC POROSIMETRY; mesoporous; anti-reflective coatings
Author
Baekmin Q. Kim1†, Zachariah Vicars1†, Máté Füredi2,3, Lilia F. Escobedo1, R. Bharath Venkatesh1‡, Stefan Guldin2,4,5, Amish J. Patel1*, Daeyeon Lee1
Topic
spectroscopic ellipsometry
Author
P. Basa, B. Fodor, Zs. Nagy, B. Oyunbolor, A. Hajtman, S. Bordács, I. Kézsmárki, A. Halbritter, Á. Orbán
Topic
ellipsometry; rotating compensator; mueller matrix; spectroscopic ellipsometer
Author
D. Le Cunff, T. Nguyen, R. Duru, F. Abbate, J. Hoglund, N. Laurent, F. Pernot, M. Wormington
Topic
Ge-Si alloys; boron; elemental semiconductors; semiconductor doping; semiconductor epitaxial layers
Author
Máté Füredi, Cristina V. Manzano, András Marton, Bálint Fodor, Alberto Alvarez-Fernandez,*
Topic
EP
Author
Maximiliano Jesus Jara Fornerod, Alberto Alvarez-Fernandez, Máté Füredi, Anandapadmanabhan A Rajendran, Beatriz Prieto-Simón, Nicolas H. Voelcker, Stefan Guldin
Topic
spectroscopic ellipsometry
Author
László Makai, Tero Lehto, Bálint Fodor, Peter King
Topic
doping; Electrical properties; spectroscopic ellipsometry; thin films; atomic layer deposition
Author
Zs.J. Horváth, P. Basa, T. Jászi, K.Z. Molnár, A.E. Pap, Gy. Molnár
Author
A. Danel, C.L. Tsai, K. Shanmugasundaram, F. Tardif, E. Kamieniecki, J. Ruzyllo
Topic
Lamp cleaning; Organic contamination; Volatile contaminants; hydrocarbons
Author
Balogh Imre, Kiss Roberta Zsófia, Egri Dávid
Topic
spectroscopic ellipsometry
Author
C. Talagrand, X. Boddaert, D.G. Selmeczi, C. Defranoux, P. Collot
Topic
InGaZnO; spectroscopic ellipsometry; Dielectric function; Process deposition; Amorphous semiconductor
Author
Homogeneous Transparent Conductive ZnO:Ga by ALD for Large LED Wafers
Topic
GZO; Atomic layer deposition; TCO; Rapid thermal annealing; LED
Author
O. Mhibik, S. Ch´enais, S. Forget, Ch. Defranoux, S. Sanaur
Topic
vertically-emitting solid-state organic lasers (VECSOLs); inkjet printing; new host polymer matrix for standard laser dyes; Tunable laser
Author
Máté Füredi, Bálint Fodor, András Marton, Alberto Alvarez-Fernandez, Aysha ARiaz, Curran Kalha, Anna Regoutz, Stefan Guldin, Péter Basa
Topic
Ellipsometers; ellipsometry; ellipsometry porosimetry; ELLIPSOMETRIC POROSIMETRY; ELLIPSOMETRIC POROSIMETRY (R&D); Mesoporous silica films; Porosimetry; mesoporous
Author
Emeric Balogh, Peter Basa, Attila Suto, Benjamin Powell, Anna Bölcskei-Molnár, and Szilvia Biró
Topic
ellipsometry; spectroscopic ellipsometry
Author
Akshay Singh, Yifei Li, Balint Fodor, Laszlo Makai, Jian Zhou, Haowei Xu, Austin Akey, Ju Li and R. Jaramillo
Topic
ellipsometry; visible spectra; Transmission electron microscopy; Density functional theory; Photonic integrated circuits; Transition metal chalcogenides; Optical metrology; Crystalline solids; Optical electronics
Author
J. Budai, B. Farkas, Z.L. Horváth, Zs. Geretovszky
Topic
ellipsometry; modelling; Artifact minimization; Numerical inversion
Author
Máté Füredi, Alberto Alvarez-Fernandez, Maximiliano Jesus Jara Fornerod, Bálint Fodor, and Stefan Guldin
Topic
spectroscopic ellipsometry; EP
Author
A.A. Khosroabadi, P. Gangopadhyay, B. Cocilovo, L. Makai, P. Basa, B. Duong, J. Thomas, and R.A. Norwood
Topic
spectroscopic ellipsometry
Author
László Makai, Benjamin Kalas, György Tiborcz
Topic
Ellipsometers; ellipsometry; Interfaces; spectroscopic ellipsometry; Surface; Surface measurement
Author
Adam J. Lovett*, Máté Füredi, Liam Bird, Samia Said, Brandon Frost, Paul R. Shearing, Stefan Guldin, Thomas S. Miller*
Topic
spectroscopic ellipsometry
Author
K. Wang, B. Cheng, B. Wu, C. Defranoux, P. Basa, C. Song, G. Han, Y. Liu
Topic
spectroscopic ellipsometry; Fluorinated tin oxide; Low emissivity; annealing
Author
Windisch M., Buza G., Maloveczky A., Vida Á., Selmeczi D., Dankházi Z.:
Topic
Si surfaces; spectroscopic ellipsometry; surface treatment
Author
Aysha A. Riaz, Curran Kalha Maria Basso, Máté Füredi, Anna Regoutz
Topic
spectroscopic ellipsometry
August 18, 2025
Semilab, within the IT2 EU project, explores Mueller matrix ellipsometry as a powerful method to detect asymmetries in forksheet FETs—offering enhanced precision over conventional techniques and supporting Europe's push for semiconductor innovation.
August 18, 2025
Explore how advanced metrology plays a crucial role in the photovoltaic industry by enhancing efficiency, ensuring quality control, supporting research and development, and reducing costs.
August 18, 2025
Enabling precise optical characterization of bulk liquids using advanced spectral ellipsometry despite interface instability.
August 18, 2025
Advancing wettability analysis of nanostructured thin films with ellipsometric porosimetry and spectral ellipsometry.
August 18, 2025
Real-time in situ spectroscopic ellipsometry reveals key insights into sub-nanoscale growth of molybdenum carbide thin films.
October 17, 2025
Technological development is transforming every aspect of our lives and our world at an unprecedented rate, and Semilab proudly contributes to this incredible pace.
August 18, 2025
Innovation in the electronic display industry is driven by advanced R&D tools enabling precise measurement and development.