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The SRP-170 is a cost-effective, spreading resistance profiler designed for silicon semiconductor dopant and resistivity profiling. Ideal for universities, research institutes, and low-volume analytical labs, it offers reliable performance with manual loading and expert-guided operation. Additional sample preparation kit for in-house sample preparation included.
Author
Samu Viktor, Kerekes 脕rp谩d, Pongr谩cz Anita, Durk贸 Zsolt
Topic
microPL; JPV; photo-modulated reflectance
Author
E. E. Najbauer, L. Sink贸, Sz. Bir贸, Z. Durk贸, P. Basa
Topic
carrier density; epitaxial layer; semiconductor; Silicon (Si); SRP-2100; SRP; FTIR REFLECTOMETRY