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Evaluation of Advanced Pre-Gate Cleanings
Published to:
Cleaning Technology in Semiconductor Device Manufacturing, Proceedings of the Sixth International Symposium Oct.1999), Vol. 99-36, pages 59-68
Year:
1999
Author:
C. Cowache, P. Boelen, I. Kashkoush, P Besson, F. Tardif
pre-gate cleaning
particle removal
metal removal
surface microroughness
surface passivation
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