Semilab

WT-2000 Wafer Tester

Lifetime Tester (WT) systems are advanced and versatile measurement platforms designed to perform a wide range of material characterization tasks, including carrier lifetime measurement, resistivity mapping, metal contamination detection, and other critical semiconductor property evaluations. These systems combine multiple measurement techniques and come with all accessories necessary for mapping, to deliver comprehensive wafer analysis for both research and industrial applications.

Each system can be configured based on the user’s requirements by adding measurement capabilities and automation capabilities described below. Get in touch and find your perfect WT-2000 configuration!

Related Publications

Analytical and Diagnostic Techniques for Semiconductor Materials, Devices and Processes, Proceedings of ALTECH 99, Leuven, Belgium, Electrochemical Society Proceedings Volume 99-16, 48-55.1999

Lifetime Measurements in SOI and Epi Structures

Author: T. Pavelka, Z. Batari
lifetimeSOIEPI
Read publication
arxiv.org, Condensed Matter, Materials Science2025

A Versatile System for Photoconductance Decay Measurement Across a Wide Range of Semiconductor Materials

Author: András Bojtor, Dávid Krisztián, Gábor Paráda, Ferenc Korsós, Sándor Kollarics, Gábor Csősz, Bence G. Márkus, László Forró, Ferenc Simon
uPCD
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J. Electrochem. Soc.148 2001) 11, p. G655.-G661.2001

Carrier Lifetime Analysis by Photoconductive Decay and Free Carrier Absorption Measurements

Author: H-J. Schulze, A. Frohnmeyer, F.-J. Niedernostheide, F. Hille, P. Tüttő, T. Pavelka, G. Wachutka
Silicon (Si)elemental semiconductorscarrier lifetimephotoconductivity
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Meeting of the Electrochemical Society, Phoenix2000

Carrier Lifetime Control and Characterization of High-Resistivity Silicon Used for High-Power Devices

Author: H-J. Schulze, A. Frohnmeyer, F-J. Niedernostheide, F. Hille, P. Tüttő, T. Pavelka, G. Wachutka
carrier lifetimeSilicon (Si)high power device
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Materials Research Society MRS, Spring Meeting2006

Carrier Lifetime Mapping and Lifetime Studies of 4H-SiC Epilayers

Author: J.D. Caldwell, P. B. Klein, O. Glembocki, K. Hobart, F. Kub, A. Pap, T. Pavelka, A. Shrivastava, Z. Zhang, T. Sudarshan, G. Webster
carrier lifetimesilicon carbide (SiC)epilayer
Read publication
European Photovoltaic Solar Energy Conference and Exhibition (EUPVSEC) 2021 Conference Proceedings p.194 - 1972021

Carrier Lifetime Measurements of Monocrystalline Silicon Ingots Using Upgraded Laser E-PCD Technique

Author: D. Krisztián, F. Korsós, I. Saegh, G. Paráda, P. Tüttő, X. Dong and H. Deng, S. Wang, X. Chen
carrier lifetimeIngotMonocrystallinerecombination
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Journal of Materials Chemistry C, 2015, Advance Article2015

Carrier Scattering and Relaxation Dynamics in n-Type In0.83Ga0.17As as a Function of Temperature and Doping Density

Author: Y. Ma, Y. Gu, Y. Zhang, X. Chen, S. Xi, Z. Boldizsár, L. Huang, L. Zhou
Carrier scatteringrelaxation dynamicsIn0.83Ga0.17As
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Nucl. Inst. Meth. B127-128, 388-3921997

Charge Carrier Lifetime Modification in Silicon by High Energy H+ or He+ Ion

Author: Nucl. Inst. Meth. B127-128, 388-392
carrier lifetimeSilicon (Si)Ion Implantation
Read publication
Materials Science Forum, 248-249, 101-1031997

Charge Carrier Lifetime Modification in Silicon by High Energy H+, He+ Ion Implantation

Author: N.Q. Khanh, P. Tüttő, E.N. Jaroli, O. Buiu, L.P. Bíró, F. Pászti, T. Mohácsy, Cs. Kovacsics, A. Manuaba, J. Gyulai
Charge Carrier LifetimeExcess Charge PocketIon ImplantationLifetime Tailoring
Read publication
World Conference on Photovoltaic Solar Energy Conversion, Osaka2003

Comparative Study on Emitter Sheet Resitivity Measurements for Inline Quality Control

Author: E. Rüland, P. Fath, T. Pavelka, A. Pap, K. Peter, J. Mizsei
diffusioneddy current testingElectrical resistivityelemental semiconductors
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European Photovoltaic Solar Energy Conference and Exhibition2013

Comparison of Laser Textured Silicon Surfaces Prepared by Different Laser Sources

Author: Z. Tóth, A. Gárdián, M. Füle, J. Csontos, F. Korsós, P. Basa
Laser ProcessingSilicon (Si)Texturisation
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Solar Energy Materials and Solar Cells, Volume 218, 1107662020

Contactless Measurement of Sheet Resistance and Mobility of Inversion Charge Carriers on PV Wafers

Author: Ferenc Korsós, Géza László, Péter Tüttő, Sebastien Dubois, Nicolas Enjalbert, Krisztián Kis-Szabó, Attila Tóth
Characterisationinversion layer sheet resistancejunction photovoltage techniqueNon-contact
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Appl. Phys. Lett. 96 2010) 1229062010

Contactless Mobility Measurements of Inversion Charge Carriers on Silicon Substrates with SiO2 and HfO2 Gate Dielectrics

Author: J-L. Everaert, E. Rosseel, J. Dekoster, A. Pap, A. Mészáros, K. Kis-Szabó, T. Pavelka
DielectricsCarrier mobilityCharge carriersDielectric thin films
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Materials Science & Engineering B91-92 2002), 192-2102002

Contactless Surface Charge Semiconductor Characterization

Author: D.K. Schröder
Silicon (Si)Electric measurementsMetal–insulator–semiconductor structuresSurface and interface states
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EU PVSEC 2024 - Vienna, Austria Conference Proceedings2024

Contactless carrier lifetime characterization of silicon heterojunction structures at elevated temperatures

Author: Gergely Havasi, Dávid Krisztián, (Zs. Gombás -BME-, Z. Ádám -EcoSolifer Heterojunction Ltd.), Ferenc Korsós
laser controlled photoconductance decay (PCD)
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TI Technical Journal, Engineering Quality, April-June, 19981998

Contamination reduction and control in integrated circiut manufacturing

Author: J.E. Steinle
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Advanced Thermal Processing of Semiconductors, 2008. RTP 2008. 16 IEEE International Conference on2008

Control of Laser Induced Interface Traps with In-line Corona Charge Metrology

Author: J-L. Everaert, E. Rosseel, C. Ortolland, M. Aoulaiche, T. Hoffmann, T. Pavelka, E. Don
corona chargein-linetraps
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J. Phys.: Condensed Matter, 14 2002), 13119-131252002

Detection of Low-Level Copper Contamination in p-Type Silicon by Means of Microwave Photoconductive Decay Measurements

Author: M. Yil-Koski, M. Palokangas, A. Haarahiltunen, H. Vainöla, J. Storgards, H. Holmberg, J. Sinkkonen
recombination of copperMicrowave Photoconductive Decay (μ-PCD)high-intensity bias lightinterstitial copper
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Analytical Sciences, The Japan Society for Analytical Chemistry, Vol. 19, July 2003, pp. 1051-10542003

Determination of Metallic Impurities in a Silicon Wafer by Local Etching and Electrothermal Atomic Absorption Spectrometry

Author: H-Y. Chung, S-H Lee, Y-H. Kim, K-S. Lee, D-H. Kim
metallic impurities distributionetching techniqueET-AAS
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Solar Energy Materials and Solar Cells 113 2013) 522013

Development of a-Si:H/c-Si Heterojunctions for the i2-Module Concept: Low-Temperature Passivation and Emitter Formation on Wafers Bonded to Glass

Author: J. Govaerts, S.N. Granata, T. Bearda, F. Dross, C. Boulord, G. Beaucarne, F. Korsós, K. Baert, I. Gordon, J. Poortmans
PECVDHeterojunctionSilicone bondingModule-level processing
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Jpn. J. Appl. Phys., Vol. 34 1995), pp. 932-9361995

Element Specific Diagnosis Using Microwave Reflection Photoconductive Decay

Author: L. Köster, P. Blöchl, L. Fábry
element specific drive-in treatmentsMicrowave Photoconductive Decay (μ-PCD)metal contaminationinjection level
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Cleaning Technology in Semiconductor Device Manufacturing, Proceedings of the Sixth International Symposium Oct.1999), Vol. 99-36, pages 59-681999

Evaluation of Advanced Pre-Gate Cleanings

Author: C. Cowache, P. Boelen, I. Kashkoush, P Besson, F. Tardif
pre-gate cleaningparticle removalmetal removalsurface microroughness
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TI Technical Journal, Engineering Technology, April-June, 19991999

Evaluation of precipitation and denuded zone depth on different silicon materials

Author: J.E. Steinle
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European Photovoltaic Solar Energy Conference and Exhibition 7-11 June 2004, Paris, France)

First Results of the Solarcentre Erfurt - a New Pertner in Photovoltaic Research

Author: S. Dauwe, L. Mittelstadt, A. Lawerenz, H.J. Freitag,C. Beneking, H. Aulich
Fourier transform infrared spectroscopyMicrowave-induced photoconductance decayLight beam induced current mappingSpectral Response
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Solid-State Phenomena, Vols. 69-70, pp. 291-294.1999

Gettering of Unintentionally Contaminated Silicon Wafers by Phosphorous Ion Implantation and Annealing

Author: M. Yli-Koski, J. Mellin, V. Ovchinnikov
GetteringPhosphorous Ion ImplantationSilicon (Si)surface photovoltage
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J. Electrochem. Soc., 143, No. 1, 216-2201996

Identification Possibility of Metallic Impurities in p-Type Silicon by Lifetime Measurement

Author: T.S. Horányi, P. Tüttő, Cs. Kovacsics
oxidationSilicon (Si)temperaturenitrogen compounds
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International Conference on Advanced Thermal Processing of Semiconductors RTP), 20102010

Impact of Laser Anneal Thermal Budget on the Quality of Thin SiGe Channels with a High Ge Content

Author: E. Rosseel, A. Hikavyy, J-L. Everaert, L. Witters, J. Mitard, T. Hoffmann, W. Vandervorst, A. Pap, T. Pavelka
Ge-Si alloysX-ray diffractionelemental semiconductorslaser beam annealing
Read publication
SiliconPV 2024 Conference Proceedings2024

Implied J-V curves recorded at elevated temperatures using light controlled heating

Author: Gergely Havasi, Dávid Krisztián, Ferenc Korsós, Shaoyong Fu
laser controlled photoconductance decay (PCD)
Read publication
EPJ Photovoltaics 13, 3 (2022)2022

Improved accuracy of eddy-current sensor based carrier lifetime measurement using laser excitation

Author: Dávid Krisztián*, Ferenc Korsós, Ilias Saegh, Gábor Paráda, Martin Kovács, Zita Verdon, Csaba Jobbágy, Péter Tüttö, Xueqian Dong, Hao Deng, Shasha Wang and Xiaobo Chen
carrier lifetimeeddy current testingphotoconductive decayE-PCD CARRIER LIFETIME FOR MONO-Si
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2017 IEEE 44th Photovoltaic Specialist Conference (PVSC)2017

Improving Silicon Surface Passivation with a Silicon Oxide Layer Grown via Ozonated Deionized Water

Author: Sara Bakhshi, Ngwe Zin, Kristopher O Davis, Marshall Wilson, Ismail Kashkoush, Winston V Schoenfeld
aluminium compoundsaluminum oxidecarrier lifetimepassivation
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Applied Surface Science, 63, 306-3111993

In Situ Bulk Lifetime Measurement on Silicon with a Chemically Passivated Surface

Author: T.S. Horányi, T. Pavelka, P. Tüttő
lifetimeSilicon (Si)passivated surface
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Japanese Journ. of Applied Physics, 30, No.12B, 3630-3633

Injection Level Spectroscopy: A Novel Non-Contact Contamination Analysis Technique in Silicon

Author: G. Ferenczi, T. Pavelka, P. Tüttő
contamination analysisSilicon (Si)
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AIP Conference Proceedings Volume 2826, Issue 1 (2023)2023

Integrated measurement of the actual and small perturbation lifetimes with improved accuracy

Author: Dávid Krisztián; Ferenc Korsós; Enikő Kis; Gábor Paráda; Péter Tüttő
carrier lifetimelifetime measurementsphotoconductive decaysolar cells
Read publication
Solid State Phenomena, 32-33, 609-6141993

Investigation of Recombination Properties of Ti Double Donor in Silicon

Author: G. Ferenczi, T. Pavelka, P. Tüttő, L. Köster
recombinationTi donorSilicon (Si)
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China Semiconductor Technology International Conference 2014 CSTIC 2014)2014

Lifetime Characterization of mc:Si Bricks by Upgraded μ-PCD Technique

Author: F. Korsós, A. Jász
Microwave Photoconductive Decay (μ-PCD)photoconductive decaysurface recombination
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International Conference on Crystalline Silicon Photovoltaics SiliconPV 2013)2013

Lifetime Measurements on Attached Epilayers and Detached Epifoils Grown on Reorganised Porous Silicon Showing a Bulk Lifetime Exceeding 100 μs

Author: H.S. Radhakrishnan, M. Debucquoy, F. Korsós, K. Van Nieuwenhuysen, V. Depauw, I. Gordon, R. Mertens, J. Poortmans
epilayerbulk lifetimeporous siliconsurface recombination velocity
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IEEE Photovoltaic Specialists Conference, IEEE NewYork 2000.) p 99.2000

Lifetime mapping of Si Wafers by an Infrared Camera

Author: M. Bail, J. Kentsch, R. Brendel, M. Schulz
carrier lifetimeinfrared camera
Read publication
Proceedings of the 6th energie "Marie-Curie" Research Training Fellowship Conference, Paris, May, 2000.2000

Low-Cost High Efficient Multicrystalline Silicon for Photovoltaics

Author: M.B.I. Diaz, C. Haessler
μ-PCD; etch pit density (EPD) mappingresistivity topography
Read publication
European Photovoltaic Solar Energy Conference and Exhibition, Barcelona, Spain, 6.-10. June 20052005

Making Use of Silicon Wafers with Low Lifetimes by Adequate POCl3 Diffusion

Author: J. Lossen, L. Mittelstadt, S. Dauwe, K. Lauer, C. Beneking
carrier lifetimePOCl3diffusion
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Solid State Phenomena Vols. 108-109 pp. 643-6482005

Measurement of Copper in p-Type Silicon using Charge-Carrier Lifetime Methods

Author: M. Yli-Koski, H. Savin, E. Saarnilehto, A. Haarahiltunen, J. Sinkkonen, G. Berenyi, T. Pavelka
Copper (Cu)Silicon (Si)surface photovoltageMicrowave Photoconductive Decay (μ-PCD)
Read publication
ICSCRM 20052005

Microwave Photoconductive Decay Mapping and Investigation of Lifetimes in 4H-SiC Epitaxial Layers

Author: J.D. Caldwell, A. Pap, A. Shrivastava, Z. Zhang, P.B. Klein, T. Pavelka, T. Sudarshan, O.J. Glembocki, K. Hobart, F. Kub
silicon carbide (SiC)photoconductive decayepitaxial layer
Read publication
Advanced Energy & Sustainability Research 2024.2024

Millisecond-Scale Charge-Carrier Recombination Dynamics in the CsPbBr3 Perovskite

Author: András Bojtor, Dávid Krisztián, Ferenc Korsós, Sándor Kollarics, Gábor Paráda, Thomas Pinel, Márton Kollár, Endre Horváth, Xavier Mettan, Hidetsugu Shiozawa, Bence G. Márkus, László Forró, Ferenc Simon
carrier densitycarrier lifetimeCarrier mobilityCharge Carrier Lifetime
Read publication
EU PVSEC / WCPEC-8 Conference Proceedings2022

Modelling of Eddy-Current Measurement for Inhomogeneous Charge Carrier Depth Profile

Author: D. Krisztián, F. Korsós, M. Kovács, F. Ujhelyi, P. Tüttö
depth profileeddy current testingphotovoltaic cellsPV
Read publication
Microelectronic Engeneering, 84, 2251-22542007

Monitoring Plasma Nitridation of HfSiOx by Corona Charge Measurements

Author: J-L. Everaert, X. Shi, A. Rothschild, M. Schaekers, E. Rosseel, T. Pavelka, E. Don, S. Vanhaelemeersch
HfSiONitridationcorona chargeGate dielectric
Read publication
Semiconductor Fabtech, 4th Edition, 247-2491996

New Possibilities for the Microwave Photoconductive Decay Technique

Author: T. Pavelka
Read publication
European Photovoltaic Solar Energy Conference and Exhibition2011

New µ-PCD Based Method for Sorting Boron and Gallium Doped Feedstock Material

Author: F. Korsós, G. Paráda, D. Fátay
Wafer-Based Silicon Solar CellsSilicon FeedstockCrystallisationWafering
Read publication
TI Technical Journal, Engineering Technology, 20012001

Process induced oxide and interface charges and their reactivity with carriers in bulk silicon

Author: J.E. Steinle
Read publication
Gate Dielectric Integrity: Material, Process and Tool Qualification, ASTM STP 1382, Eds., American Society for Testing and Materials, 145-1542000

Qualification of Epi Layers and Interface Properties by an Improved µ-PCD Technique

Author: T. Pavelka, D.C. Gupta and G.A. Brown
Silicon (Si)epitaxial wafercarrier lifetimesurface/interface recombination velocity
Read publication
Appl. Phys. Letters 87, 0321092005

Quantitative Copper Measurement in Oxidized p-Type Silicon Wafers using Microwave Photoconductivity Decay

Author: H. Vainola, E. Saarnilehto, M. Yli-Koski, A. Haarahiltunen, J. Sinkkonen, G. Berenyi, T. Pavelka
Copper (Cu)illuminationprecipitationSilicon (Si)
Read publication
Physica Status Solidi a) Volume 209 Issue 10, pages 1884–18932012

Recombination via Point Defects and their Complexes in Solar Silicon

Author: A.R. Peaker, V.P. Markevich, B. Hamilton, G. Parada, A. Dudás, A. Pap, E. Don, B. Lim, J. Schmidt, L. Yu, Y. Yoon, G. Rozgonyi
Laplace deep level transient spectroscopyminority carrier lifetimepassivationrecombination
Read publication
IEEE Transactions on Electron Devices, Vol. 50, No.4, pp 906.2003

Silicon Epitaxial Layer Recombination and Generation Lifetime Characterization

Author: D.K. Schroder, B.D. Choi, S.G. Kang, W. Ohashi, K. Kitahara, G. Opposits, T. Pavelka, J. Benton
MOS capacitorscarrier lifetimeelectron-hole recombinationsemiconductor device measurement
Read publication
Solar Energy Materials and Solar Cells Volume 260, 15 September 2023, 1124612023

Simultaneous measurement of charge carrier concentration, mobility, and lifetime

Author: Dávid Krisztián, Ferenc Korsós, Gergely Havasi
carrier lifetimeCarrier mobilityCharge carriersconcentration profile
Read publication
Jpn. J. Appl. Phys. Vol 40 2001) pp. L1003-L1004, Part2, No 10A, 1 Oct. 20012001

Surface Passivation Effect of Silicon Substrates due to Quinhydrone/Ethanol Treatment

Author: H. Takato, I. Sakata, R. Shimokawa
surface passivationquinhydrone/ethanol treatmentMicrowave Photoconductive Decay (μ-PCD)
Read publication
Proceedings of the International Semiconductor Device Research Symposium (Charlottesville 1999), pp. 539-5421999

Temperature dependence of carrier recombination lifetimes in n-type silicon

Author: A. Frohnmeyer, F.-J. Niedernostheide, H.-J. Schulze, P. Tüttő, T. Pavelka, G. Wachutka
Read publication
European Photovoltaic Solar Energy Conference and Exhibition2014

Transient Method for Lifetime Characterization of Monocrystalline Si Ingots

Author: G. Paráda, F. Korsós, P. Tüttő
carrier lifetimeMonocrystallineIngot
Read publication
International Symposium on High Purity Silicon1998

Use of Non-Contact Resistivity Measurements for Epitaxy: Surface Charge Profiler Method

Author: A. Danel, F. Tardif, G. Kamarinos, M.C. Nguyen
high purity siliconSurface Charge Profiler (SCP)Doping measurements
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