Identification Possibility of Metallic Impurities in p-Type Silicon by Lifetime Measurement
Published to: J. Electrochem. Soc., 143, No. 1, 216-220
Year: 1996
Author: T.S. Horányi, P. Tüttő, Cs. Kovacsics
oxidationSilicon (Si)temperaturenitrogen compoundsoxygen compoundsquartzsurface treatment
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