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이 소형 탁상형 분광 타원계는 모듈형의 실험실 친화적 설계를 통해 박막 및 광학 특성을 정밀하게 측정할 수 있습니다. 넓은 스펙트럼 범위를 포괄하며 타원계측, 편광계측 및 12요소 뮬러 매트릭스를 포함한 유연한 측정 모드로 박막 두께, 굴절률, 소멸계수 및 다층 구조 분석을 지원합니다.
SE-1000 분광 타원편광법
저자: Lenke Kócs, Borbála Tegze, Emőke Albert, Csaba Major, András Szalai, Bálint Fodor, Péter Basa, György Sáfrán, Zoltán Hórvölgyi
주제: porous silica coatings; spectroscopic ellipsometry; ELLIPSOMETRIC POROSIMETRY; mesoporous; anti-reflective coatings
저자: Baekmin Q. Kim1†, Zachariah Vicars1†, Máté Füredi2,3, Lilia F. Escobedo1, R. Bharath Venkatesh1‡, Stefan Guldin2,4,5, Amish J. Patel1*, Daeyeon Lee1
주제: spectroscopic ellipsometry
저자: P. Basa, B. Fodor, Zs. Nagy, B. Oyunbolor, A. Hajtman, S. Bordács, I. Kézsmárki, A. Halbritter, Á. Orbán
주제: ellipsometry; rotating compensator; mueller matrix; spectroscopic ellipsometer
저자: D. Le Cunff, T. Nguyen, R. Duru, F. Abbate, J. Hoglund, N. Laurent, F. Pernot, M. Wormington
주제: Ge-Si alloys; boron; elemental semiconductors; semiconductor doping; semiconductor epitaxial layers
저자: Máté Füredi, Cristina V. Manzano, András Marton, Bálint Fodor, Alberto Alvarez-Fernandez,*
주제: EP
저자: Maximiliano Jesus Jara Fornerod, Alberto Alvarez-Fernandez, Máté Füredi, Anandapadmanabhan A Rajendran, Beatriz Prieto-Simón, Nicolas H. Voelcker, Stefan Guldin
주제: spectroscopic ellipsometry
저자: Zs.J. Horváth, P. Basa, T. Jászi, K.Z. Molnár, A.E. Pap, Gy. Molnár
저자: A. Danel, C.L. Tsai, K. Shanmugasundaram, F. Tardif, E. Kamieniecki, J. Ruzyllo
주제: Lamp cleaning; Organic contamination; Volatile contaminants; hydrocarbons
저자: Balogh Imre, Kiss Roberta Zsófia, Egri Dávid
주제: spectroscopic ellipsometry
저자: C. Talagrand, X. Boddaert, D.G. Selmeczi, C. Defranoux, P. Collot
주제: InGaZnO; spectroscopic ellipsometry; Dielectric function; Process deposition; Amorphous semiconductor
저자: Dmitriy Marinskiy, Patrick Polakowski, Piotr Edelman, Marshall Wilson, Jacek Lagowski, Joachim Metzger, Robert Binder, Johannes Müller
주제: corona - Kelvin; noncontact metrology; surface voltage; THIN FILM CHARACTERIZATION; ferroelectric; HfO2
저자: Homogeneous Transparent Conductive ZnO:Ga by ALD for Large LED Wafers
주제: GZO; Atomic layer deposition; TCO; Rapid thermal annealing; LED
저자: O. Mhibik, S. Ch´enais, S. Forget, Ch. Defranoux, S. Sanaur
주제: vertically-emitting solid-state organic lasers (VECSOLs); inkjet printing; new host polymer matrix for standard laser dyes; Tunable laser
저자: G. Szitási, F. Korsós, D. Selmeczi, O. Takács, F. Novinics, P. Tüttő, A. Findlay, M. Wilson
주제: eddy current testing; ellipsometry; fluorine; photoconducting materials; photovoltaic effects; spectroscopy; tin compounds
저자: Máté Füredi, Bálint Fodor, András Marton, Alberto Alvarez-Fernandez, Aysha ARiaz, Curran Kalha, Anna Regoutz, Stefan Guldin, Péter Basa
주제: Ellipsometers; ellipsometry; ellipsometry porosimetry; ELLIPSOMETRIC POROSIMETRY; ELLIPSOMETRIC POROSIMETRY (R&D); Mesoporous silica films; Porosimetry; mesoporous
저자: Emeric Balogh, Peter Basa, Attila Suto, Benjamin Powell, Anna Bölcskei-Molnár, and Szilvia Biró
주제: ellipsometry; spectroscopic ellipsometry
저자: Akshay Singh, Yifei Li, Balint Fodor, Laszlo Makai, Jian Zhou, Haowei Xu, Austin Akey, Ju Li and R. Jaramillo
주제: ellipsometry; visible spectra; Transmission electron microscopy; Density functional theory; Photonic integrated circuits; Transition metal chalcogenides; Optical metrology; Crystalline solids; Optical electronics
저자: J. Budai, B. Farkas, Z.L. Horváth, Zs. Geretovszky
주제: ellipsometry; modelling; Artifact minimization; Numerical inversion
저자: Máté Füredi, Alberto Alvarez-Fernandez, Maximiliano Jesus Jara Fornerod, Bálint Fodor, and Stefan Guldin
주제: spectroscopic ellipsometry; EP
저자: A.A. Khosroabadi, P. Gangopadhyay, B. Cocilovo, L. Makai, P. Basa, B. Duong, J. Thomas, and R.A. Norwood
주제: spectroscopic ellipsometry
저자: László Makai, Benjamin Kalas, György Tiborcz
주제: Ellipsometers; ellipsometry; Interfaces; spectroscopic ellipsometry; Surface; Surface measurement
저자: Adam J. Lovett*, Máté Füredi, Liam Bird, Samia Said, Brandon Frost, Paul R. Shearing, Stefan Guldin, Thomas S. Miller*
주제: spectroscopic ellipsometry
저자: K. Wang, B. Cheng, B. Wu, C. Defranoux, P. Basa, C. Song, G. Han, Y. Liu
주제: spectroscopic ellipsometry; Fluorinated tin oxide; Low emissivity; annealing
저자: Aysha A. Riaz, Curran Kalha Maria Basso, Máté Füredi, Anna Regoutz
주제: spectroscopic ellipsometry
SE-1000 분광 타원편광법
