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모듈식 분광 타원계는 단일 도구에서 가장 넓은 스펙트럼 범위(190nm~25μm)를 포괄하는 다용도가 뛰어난 박막 특성 분석 시스템입니다. 비접촉식 및 비파괴 방식으로 박막 두께, 광학 상수, 다층 스택, 고급 소재 특성을 뛰어난 유연성으로 분석할 수 있습니다.
SE-2000 분광 타원편광법
저자: Ferenc Korsós, Péter Tüttő, Ilias Saegh, Krisztián Kis-Szabó, and Attila Tóth
주제: 4pp; diffusion; junction photovoltage technique; photovoltaics; process monitoring
저자: Lenke Kócs, Borbála Tegze, Emőke Albert, Csaba Major, András Szalai, Bálint Fodor, Péter Basa, György Sáfrán, Zoltán Hórvölgyi
주제: porous silica coatings; spectroscopic ellipsometry; ELLIPSOMETRIC POROSIMETRY; mesoporous; anti-reflective coatings
저자: Baekmin Q. Kim1†, Zachariah Vicars1†, Máté Füredi2,3, Lilia F. Escobedo1, R. Bharath Venkatesh1‡, Stefan Guldin2,4,5, Amish J. Patel1*, Daeyeon Lee1
주제: spectroscopic ellipsometry
저자: P. Basa, B. Fodor, Zs. Nagy, B. Oyunbolor, A. Hajtman, S. Bordács, I. Kézsmárki, A. Halbritter, Á. Orbán
주제: ellipsometry; rotating compensator; mueller matrix; spectroscopic ellipsometer
저자: D. Le Cunff, T. Nguyen, R. Duru, F. Abbate, J. Hoglund, N. Laurent, F. Pernot, M. Wormington
주제: Ge-Si alloys; boron; elemental semiconductors; semiconductor doping; semiconductor epitaxial layers
저자: Máté Füredi, Cristina V. Manzano, András Marton, Bálint Fodor, Alberto Alvarez-Fernandez,*
주제: EP
저자: Maximiliano Jesus Jara Fornerod, Alberto Alvarez-Fernandez, Máté Füredi, Anandapadmanabhan A Rajendran, Beatriz Prieto-Simón, Nicolas H. Voelcker, Stefan Guldin
주제: spectroscopic ellipsometry
저자: László Makai, Tero Lehto, Bálint Fodor, Peter King
주제: doping; Electrical properties; spectroscopic ellipsometry; thin films; atomic layer deposition
저자: Zs.J. Horváth, P. Basa, T. Jászi, K.Z. Molnár, A.E. Pap, Gy. Molnár
저자: A. Danel, C.L. Tsai, K. Shanmugasundaram, F. Tardif, E. Kamieniecki, J. Ruzyllo
주제: Lamp cleaning; Organic contamination; Volatile contaminants; hydrocarbons
저자: Balogh Imre, Kiss Roberta Zsófia, Egri Dávid
주제: spectroscopic ellipsometry
저자: C. Talagrand, X. Boddaert, D.G. Selmeczi, C. Defranoux, P. Collot
주제: InGaZnO; spectroscopic ellipsometry; Dielectric function; Process deposition; Amorphous semiconductor
저자: Homogeneous Transparent Conductive ZnO:Ga by ALD for Large LED Wafers
주제: GZO; Atomic layer deposition; TCO; Rapid thermal annealing; LED
저자: O. Mhibik, S. Ch´enais, S. Forget, Ch. Defranoux, S. Sanaur
주제: vertically-emitting solid-state organic lasers (VECSOLs); inkjet printing; new host polymer matrix for standard laser dyes; Tunable laser
저자: Máté Füredi, Bálint Fodor, András Marton, Alberto Alvarez-Fernandez, Aysha ARiaz, Curran Kalha, Anna Regoutz, Stefan Guldin, Péter Basa
주제: Ellipsometers; ellipsometry; ellipsometry porosimetry; ELLIPSOMETRIC POROSIMETRY; ELLIPSOMETRIC POROSIMETRY (R&D); Mesoporous silica films; Porosimetry; mesoporous
저자: Emeric Balogh, Peter Basa, Attila Suto, Benjamin Powell, Anna Bölcskei-Molnár, and Szilvia Biró
주제: ellipsometry; spectroscopic ellipsometry
저자: Akshay Singh, Yifei Li, Balint Fodor, Laszlo Makai, Jian Zhou, Haowei Xu, Austin Akey, Ju Li and R. Jaramillo
주제: ellipsometry; visible spectra; Transmission electron microscopy; Density functional theory; Photonic integrated circuits; Transition metal chalcogenides; Optical metrology; Crystalline solids; Optical electronics
저자: J. Budai, B. Farkas, Z.L. Horváth, Zs. Geretovszky
주제: ellipsometry; modelling; Artifact minimization; Numerical inversion
저자: Máté Füredi, Alberto Alvarez-Fernandez, Maximiliano Jesus Jara Fornerod, Bálint Fodor, and Stefan Guldin
주제: spectroscopic ellipsometry; EP
저자: A.A. Khosroabadi, P. Gangopadhyay, B. Cocilovo, L. Makai, P. Basa, B. Duong, J. Thomas, and R.A. Norwood
주제: spectroscopic ellipsometry
저자: László Makai, Benjamin Kalas, György Tiborcz
주제: Ellipsometers; ellipsometry; Interfaces; spectroscopic ellipsometry; Surface; Surface measurement
저자: Adam J. Lovett*, Máté Füredi, Liam Bird, Samia Said, Brandon Frost, Paul R. Shearing, Stefan Guldin, Thomas S. Miller*
주제: spectroscopic ellipsometry
저자: K. Wang, B. Cheng, B. Wu, C. Defranoux, P. Basa, C. Song, G. Han, Y. Liu
주제: spectroscopic ellipsometry; Fluorinated tin oxide; Low emissivity; annealing
저자: Windisch M., Buza G., Maloveczky A., Vida Á., Selmeczi D., Dankházi Z.:
주제: Si surfaces; spectroscopic ellipsometry; surface treatment
저자: Aysha A. Riaz, Curran Kalha Maria Basso, Máté Füredi, Anna Regoutz
주제: spectroscopic ellipsometry
SE-2000 분광 타원편광법
