DLS-83D 是一款緊湊的桌上型深階暫態光譜 (DLTS) 系統，專為半導體晶圓中電活性缺陷（深階載子陷阱）與雜質的高靈敏度特性分析與鑑定而設計。本設備體積精巧，能提供精確且可靠的量測結果，是大學、材料科學研究中心及先進研發實驗室的理想選擇。
DLS-83D 深階暫態光譜儀
作者: Mikio Fukuhara, Tomonori Yokotsuka, Tetsuo Samoto, Masahiko Kumadaki, Mitsuhiro Takeda, Toshiyuki Hashida
主題: Hall effect measurements; Materials science; Organic contamination; semiconductor; semiconductor materials; Semiconductor Devices; NANO HARDNESS; PDL Hall
作者: H-J. Schulze, A. Frohnmeyer, F-J. Niedernostheide, B. Simmnacher, B.O. Kolbesen, P. Tüttő, T. Pavelka, G. Wachutka
主題: transition metals; contamination; carrier lifetime; silicon defect density
作者: L. Quattropani, K. Solt, P. Niedermann, I. Maggio-Aprile, O. Fischer, T. Pavelka
主題: Schottky diode; RF plasma treated silicon
作者: M. Wilson, J. Lagowski, L. Jastrzebski, A. Savtchouk, V. Faifer
主題: COCOS; Dielectrics; Semiconductor device characterization; Dielectric thin films; Electric measurements; Contact potential
作者: D.K. Schröder
主題: Silicon (Si); Electric measurements; Metal–insulator–semiconductor structures; Surface and interface states; Contact potential; Work function; Epitaxial silicon
作者: C.A. Londos, T. Pavelka
主題: DLTS; GaAs
作者: D.A. Ramappa, W.B. Henley
主題: diffusion; iron; silicon dioxide
作者: D. Huber, P. Eichinger, G. Ferenczi, T. Pavelka, G. Veszely
主題: Microwave transient spectroscopy; deep levels; semiconductor
作者: T. Pavelka and G. Ferenczi
主題: Thermal emission; deep trap
作者: B. Sandhu, T. Ogikubo, H. Goto, V. Csapó, T. Pavelka
主題: DLTS; SIRM; Silicon (Si); Mo; Fe; deep levels; carrier lifetime
作者: T. Pavelka and B. Hemm
主題: Microwave Absorption Spectroscopy
作者: O. Engström, M.Kaniewska, W.Jung, M.Kaczmarczyk
主題: Deep level transient spectroscopy; quantum dots; tunneling; conduction bands; electric field
