SE-2000 光譜式橢圓偏振儀

薄膜測量的新穎預處理

用於光伏晶圓發射極薄層電阻測試的準確接觸式和非接觸式方法

作者: Ferenc Korsós, Péter Tüttő, Ilias Saegh, Krisztián Kis-Szabó, and Attila Tóth

主題: 4pp; diffusion; junction photovoltage technique; photovoltaics; process monitoring

氨蒸汽誘導各種基材上介孔二氧化矽塗層的雙層轉變

作者: Lenke Kócs, Borbála Tegze, Emőke Albert, Csaba Major, András Szalai, Bálint Fodor, Péter Basa, György Sáfrán, Zoltán Hórvölgyi

主題: porous silica coatings; spectroscopic ellipsometry; ELLIPSOMETRIC POROSIMETRY; mesoporous; anti-reflective coatings

能使未飽和水蒸氣凝結並滲出水滴之親疏水兩性奈米孔隙

作者: Baekmin Q. Kim1†, Zachariah Vicars1†, Máté Füredi2,3, Lilia F. Escobedo1, R. Bharath Venkatesh1‡, Stefan Guldin2,4,5, Amish J. Patel1*, Daeyeon Lee1

主題: spectroscopic ellipsometry

穆勒矩陣透射橢圓光度法分析瘧疾感染副產物

作者: P. Basa, B. Fodor, Zs. Nagy, B. Oyunbolor, A. Hajtman, S. Bordács, I. Kézsmárki, A. Halbritter, Á. Orbán

主題: ellipsometry; rotating compensator; mueller matrix; spectroscopic ellipsometer

結合薄 SiGe:B 層計量技術的優勢

作者: D. Le Cunff, T. Nguyen, R. Duru, F. Abbate, J. Hoglund, N. Laurent, F. Pernot, M. Wormington

主題: Ge-Si alloys; boron; elemental semiconductors; semiconductor doping; semiconductor epitaxial layers

Beyond the Meso-/Macroporous boundary: Extending Capillary Condensation-based Pore Size Characterization in Thin Films Through Tailored Adsorptives

作者: Máté Füredi, Cristina V. Manzano, András Marton, Bálint Fodor, Alberto Alvarez-Fernandez,*

主題: EP

Block copolymer-assembled nanopore arrays enable ultrasensitive label-free DNA detection

作者: Maximiliano Jesus Jara Fornerod, Alberto Alvarez-Fernandez, Máté Füredi, Anandapadmanabhan A Rajendran, Beatriz Prieto-Simón, Nicolas H. Voelcker, Stefan Guldin

主題: spectroscopic ellipsometry

突破性儀器與產品：在一台儀器中透過橢圓偏振光譜法研究原子層沉積的 Al:ZnO 層（從深紫外線到中紅外線）

作者: László Makai, Tero Lehto, Bálint Fodor, Peter King

主題: doping; Electrical properties; spectroscopic ellipsometry; thin films; atomic layer deposition

嵌入半導體奈米晶體的氮化矽基非揮發性記憶體結構的充電行為

作者: Zs.J. Horváth, P. Basa, T. Jászi, K.Z. Molnár, A.E. Pap, Gy. Molnár

透過燈照明清潔矽表面

作者: A. Danel, C.L. Tsai, K. Shanmugasundaram, F. Tardif, E. Kamieniecki, J. Ruzyllo

主題: Lamp cleaning; Organic contamination; Volatile contaminants; hydrocarbons

Detection of structural asymmetries in Forksheet FET arrays using Mueller matrix ellipsometry, a theoretical study

作者: Balogh Imre, Kiss Roberta Zsófia, Egri Dávid

主題: spectroscopic ellipsometry

非晶銦鎵鋅氧化物濺鍍薄膜製程沉積的橢圓光度研究

作者: C. Talagrand, X. Boddaert, D.G. Selmeczi, C. Defranoux, P. Collot

主題: InGaZnO; spectroscopic ellipsometry; Dielectric function; Process deposition; Amorphous semiconductor

用於大型 LED 晶圓的 ALD 均質透明導電 ZnO:Ga

作者: Homogeneous Transparent Conductive ZnO:Ga by ALD for Large LED Wafers

主題: GZO; Atomic layer deposition; TCO; Rapid thermal annealing; LED

噴墨列印垂直發射固態有機雷射器

作者: O. Mhibik, S. Ch´enais, S. Forget, Ch. Defranoux, S. Sanaur

主題: vertically-emitting solid-state organic lasers (VECSOLs); inkjet printing; new host polymer matrix for standard laser dyes; Tunable laser

橢圓孔徑法研究介孔二氧化矽材料的內部潤濕性

作者: Máté Füredi, Bálint Fodor, András Marton, Alberto Alvarez-Fernandez, Aysha ARiaz, Curran Kalha, Anna Regoutz, Stefan Guldin, Péter Basa

主題: Ellipsometers; ellipsometry; ellipsometry porosimetry; ELLIPSOMETRIC POROSIMETRY; ELLIPSOMETRIC POROSIMETRY (R&D); Mesoporous silica films; Porosimetry; mesoporous

透過光譜橢圓光度法監測垂直腔表面發射雷射應用的亞波長光柵結構

作者: Emeric Balogh, Peter Basa, Attila Suto, Benjamin Powell, Anna Bölcskei-Molnár, and Szilvia Biró

主題: ellipsometry; spectroscopic ellipsometry

過渡金屬二硫化物的近紅外線光學性質和建議的相變用途

作者: Akshay Singh, Yifei Li, Balint Fodor, Laszlo Makai, Jian Zhou, Haowei Xu, Austin Akey, Ju Li and R. Jaramillo

主題: ellipsometry; visible spectra; Transmission electron microscopy; Density functional theory; Photonic integrated circuits; Transition metal chalcogenides; Optical metrology; Crystalline solids; Optical electronics

使用自動偽影最小化方法從光譜橢偏資料確定光學性質和層結構

作者: J. Budai, B. Farkas, Z.L. Horváth, Zs. Geretovszky

主題: ellipsometry; modelling; Artifact minimization; Numerical inversion

介孔二氧化矽濕度感測器的合理設計

作者: Máté Füredi, Alberto Alvarez-Fernandez, Maximiliano Jesus Jara Fornerod, Bálint Fodor, and Stefan Guldin

主題: spectroscopic ellipsometry; EP

金屬和金屬氧化物多層混合等離子體奈米結構的光譜橢圓光度術

作者: A.A. Khosroabadi, P. Gangopadhyay, B. Cocilovo, L. Makai, P. Basa, B. Duong, J. Thomas, and R.A. Norwood

主題: spectroscopic ellipsometry

自由液-液和液-空氣界面的光譜橢圓測量研究

作者: László Makai, Benjamin Kalas, György Tiborcz

主題: Ellipsometers; ellipsometry; Interfaces; spectroscopic ellipsometry; Surface; Surface measurement

Structural Evolution of Silicon Nitride Anodes during Electrochemical Lithiation

作者: Adam J. Lovett*, Máté Füredi, Liam Bird, Samia Said, Brandon Frost, Paul R. Shearing, Stefan Guldin, Thomas S. Miller*

主題: spectroscopic ellipsometry

橢圓偏振光譜法研究退火對SnO2:F/SiCxOy低輻射率塗層光電性的影響

作者: K. Wang, B. Cheng, B. Wu, C. Defranoux, P. Basa, C. Song, G. Han, Y. Liu

主題: spectroscopic ellipsometry; Fluorinated tin oxide; Low emissivity; annealing

Szilicium felületkezelése femtoszekundomos lézerrel（使用飛秒雷射技術進行表面處理）

作者: Windisch M., Buza G., Maloveczky A., Vida Á., Selmeczi D., Dankházi Z.:

主題: Si surfaces; spectroscopic ellipsometry; surface treatment

穩定劑濃度對In2O3薄膜形成的影響

作者: Aysha A. Riaz, Curran Kalha Maria Basso, Máté Füredi, Anna Regoutz

主題: spectroscopic ellipsometry